Controlled formation of multilayer nanoscale coatings from the vacuum arc discharge plasma
Autor: | A A Lisenkov, M. L. Vinogradov, Maria I. Pikus, Yulia M. Mosolova, D. K. Kostrin |
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Rok vydání: | 2017 |
Předmět: |
010302 applied physics
Zirconium Materials science Metallurgy Intermetallic chemistry.chemical_element Nanotechnology 02 engineering and technology Vacuum arc engineering.material 021001 nanoscience & nanotechnology 01 natural sciences Zirconium carbide chemistry.chemical_compound chemistry Coating 0103 physical sciences Electrode engineering Electronics 0210 nano-technology Layer (electronics) |
Zdroj: | 2017 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus). |
DOI: | 10.1109/eiconrus.2017.7910766 |
Popis: | In this work controlled formation of the multilayer nanoscale coatings for the later obtainment of the antiemissive intermetallic coating applied to the grid electrodes of the powerful generator lamps is considered. The result of the research is the creation of a technology for achievement of a defect-free layer of zirconium carbide, ensuring acquisition of the intermetallic compound of high quality and improving operational properties of the electronic devices. |
Databáze: | OpenAIRE |
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