An automated system based on cryogenic probe station for integrated studies of semiconductor light-emitting structures and wafers in the range of 15 to 475 K
| Autor: | O. V. Kucherova, V. I. Zubkov, I. N. Yakovlev, A V Solomonov |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
Admittance business.industry chemistry.chemical_element Atmospheric temperature range Condensed Matter Physics Laser Electronic Optical and Magnetic Materials law.invention Semiconductor Optics chemistry law LCR meter Materials Chemistry Optoelectronics Wafer Electrical and Electronic Engineering business Helium Diode |
| Zdroj: | Russian Microelectronics. 44:203-209 |
| ISSN: | 1608-3415 1063-7397 |
| Popis: | An automated system for integrated electrophysical and optical studies of semiconductor nanoheterostructures, which operates in a wide temperature range from 15 to 475 K, is designed. The setup is intended to measure the temperature and frequency admittance and electroluminescence spectra of light-emitting diode and laser chips formed on substrates of diameter up to 50.2 mm, and the distribution of parameters over the wafer. The setup includes the closed-cycle helium cryogenic station, LCR meter, and temperature controller. The characterization results of nanoheterostructures with InGaN/GaN multiple quantum wells, which are used for creating highly efficient white and blue light-emitting diodes, are presented. |
| Databáze: | OpenAIRE |
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