Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization
| Autor: | Zdenek Havranek, Michal Skalsky, Jiri Fialka |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Piezoelectric coefficient business.industry Detector Phase (waves) 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences Signal Computer Science::Other Compensation (engineering) law.invention Interferometry Optics law 0103 physical sciences Harmonic Medicine 0210 nano-technology business |
| Zdroj: | I2MTC |
| DOI: | 10.1109/i2mtc.2019.8826963 |
| Popis: | An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning. |
| Databáze: | OpenAIRE |
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