Structural transformations in a-As2S3 under Au+ ions irradiation

Autor:	T Tzvetkov, R Vichev, J Assa, A Buroff, N Drandarov, R Stoycheva-Topalova, S Necheva
Rok vydání:	1998
Předmět:	Materials science X-ray photoelectron spectroscopy Resist Analytical chemistry High resolution Penetration (firestop) Irradiation Solubility Condensed Matter Physics Instrumentation Fluence Surfaces Coatings and Films Ion
Zdroj:	Vacuum. 51:277-279
ISSN:	0042-207X
DOI:	10.1016/s0042-207x(98)00174-2
Popis:	The ion induced structural changes in evaporated layers of a-As 2 S 3 under the action of Au + ions with energies in the range of 6–19 keV and beam fluxes between 10 12 to 10 15 ions\cm 2 are studied. It is shown that the solubility of the evaporated layers of As 2 S 3 increases under Au + ions irradiation at a fluence up to 10 14 ions\cm 2 and decreases at a fluence of more than 10 14 ions\cm 2 . Thus, a positive or a negative ion resists with high resolution can be developed depending on the irradiation dose. Ion-induced changes in the solubility of the layers occur at a depth greater than the penetration range calculated by the TRIM code of the Au + ions. XPS study supports the TRIM results and provides the data for understanding this phenomenon.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::29a0093558e97e7a032ec5b0fee3a8b8 https://doi.org/10.1016/s0042-207x(98)00174-2 Zobrazit plný text záznamu Full Text from ScienceDirect