Optical Communication Through Stacked Silicon Wafers Using Monolithic Thin Film Epitaxial Liftoff InGaAsP Emitters And Detectors

Autor:	K.H. Calhoun, Nan Marie Jokerst, C. Camperi-Ginestet
Rok vydání:	2005
Předmět:	Silicon photonics Materials science Silicon business.industry Optical communication chemistry.chemical_element Epitaxy law.invention chemistry Etching (microfabrication) law Optoelectronics Wafer Thin film business Light-emitting diode
Zdroj:	Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, Smart Pixels.
DOI:	10.1109/leosst.1992.697472
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2934d25f6abb3ffa166bb53ea4ce2dd8 https://doi.org/10.1109/leosst.1992.697472 Zobrazit plný text záznamu