Inertial sensing MEMS device using a floating-gate MOS transistor as transducer by means of modifying the capacitance associated to the floating gate
| Autor: | M. A. Reyes-Barranca, J. Mares-Carreño, Miguel Angel Aleman-Arce, S. Mendoza-Acevedo, Griselda Stephany Abarca-Jimenez, Benito Granados-Rojas, Jacobo Esteban Munguía-Cervantes |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Multiphysics 02 engineering and technology 01 natural sciences Capacitance law.invention Hardware_GENERAL law 0103 physical sciences Hardware_INTEGRATEDCIRCUITS Electrical and Electronic Engineering 010302 applied physics Microelectromechanical systems business.industry Transistor 021001 nanoscience & nanotechnology Condensed Matter Physics Electronic Optical and Magnetic Materials Surface micromachining Transducer CMOS Hardware and Architecture Optoelectronics 0210 nano-technology business Coupling coefficient of resonators |
| Zdroj: | Microsystem Technologies. 24:2753-2764 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-017-3647-7 |
| Popis: | In this work, a novel application of floating gate MOS transistors is presented. An inertial sensor with an embedded FGMOS was designed, simulated and fabricated using commercially available CMOS technology, like the ON Semiconductor 0.5 µm, two poly, three metal, N-well, post-processed using a surface micromachining etchant to obtain a CMOS-MEMS chip, and tested. COMSOL multiphysics was used for electro-mechanical evaluation of the inertial system, PSPICE for electrical behavior analysis, Keithley instruments for electrical characterization, and Labview for data acquisition for electrical characterization. In this work, it is demonstrated that an embedded FGMOS can be used to correlate drain current either for static or dynamic inertial parameters. The presented work demonstrates the feasibility to change the coupling coefficient of the FGMOS by means of a MEMS structure, like an accelerometer, to convert displacement into an electrical signal, being suitable for integration in more complex systems. |
| Databáze: | OpenAIRE |
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