Time-dependent dielectric breakdown (TDDB) for Co0.65Ti0.35 as a single barrier/liner in local Co interconnects

Autor:	Xuebing Zhou, Jing Xu, Jianfeng Gao, Jinbiao Liu, Dan Zhang, Yaodong Liu, Xianglie Sun, Mengjuan Kong, Yongliang Li, Junfeng Li, Wenwu Wang, Tianchun Ye, Jun Luo
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Journal of Materials Science: Materials in Electronics. 33:14063-14070
ISSN:	1573-482X 0957-4522
DOI:	10.1007/s10854-022-08337-z
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2926d6aa6311e5966cc259ad203c63be https://doi.org/10.1007/s10854-022-08337-z Zobrazit plný text záznamu Full text from SpringerLink