Effects of Silica Sources on Nanoporous Organosilicate Films Templated with Tetraalkylammonium Cations

Autor:	Mikhail R. Baklanov, Abheesh N. Busawon, Christine E. A. Kirschhock, Salvador Eslava, Karen Maex, Jone Urrutia, Johan A. Martens, Francesca Iacopi
Rok vydání:	2009
Předmět:	chemistry.chemical_compound Materials science chemistry Nanoporous Inorganic chemistry Dielectric Thin film Silane Tetraethyl orthosilicate Characterization (materials science) Sol-gel
Zdroj:	MRS Proceedings. 1156
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-1156-d03-01
Popis:	Nanoporous organosilicate films have been recently prepared using tetraalkylammonium cations in acid and basic media, outperforming other materials. Resulting films using basic medium were called zeolite-inspired low-k dielectrics. Here we study the dependence of the properties of these films on the used silica sources: methyltrimethoxy silane (MTMS) and tetraethyl orthosilicate (TEOS). A set of experiments varying the MTMS:TEOS ratio were prepared in acid medium and characterized. A textural, physico-chemical, mechanical, and electrical characterization of this series of experiments is presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::28e554e05eb7dab8f096dc63965dad05 https://doi.org/10.1557/proc-1156-d03-01 Zobrazit plný text záznamu Full text from SpringerLink