High-SPL and Low-Driving-Voltage pMUTs by Sputtered Potassium Sodium Niobate

Autor:	Fan Xia, Yande Peng, Sedat Pala, Ryuichi Arakawa, Wei Yue, Pei-Chi Tsao, Chun-Ming Chen, Hanxiao Liu, Megan Teng, Jong Ha Park, Liwei Lin
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI:	10.1109/mems49605.2023.10052391
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::28e0b0ce9ddeabe16a1fa07baa3a83de https://doi.org/10.1109/mems49605.2023.10052391 Zobrazit plný text záznamu