A Method for the Suppression of Multiple Spurious Modes

Autor:	Ryan Q. Rudy, Jeffrey S. Pulskamp, Sunil A. Bhave, Ronald G. Polcawich, Jonathan M. Puder
Rok vydání:	2018
Předmět:	Physics Microelectromechanical systems Mechanical Engineering Acoustics Mode (statistics) 01 natural sciences Zirconate 010309 optics Harmonic analysis Vibration Resonator Harmonics 0103 physical sciences Electrical and Electronic Engineering Spurious relationship 010301 acoustics
Zdroj:	Journal of Microelectromechanical Systems. 27:269-275
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2018.2793100
Popis:	This paper reports on a novel electrode design technique for spur suppression in parallel-plate piezoelectric resonators with minimal impact on the intended vibration mode. To demonstrate this technique, fabricated two-port resonators were designed to optimally excite the first harmonic of length extension in a lead zirconate titanate-on-silicon resonator and suppress chosen higher harmonics. The targeted harmonics have been largely suppressed, while the intended mode experienced no change in magnitude. This is the first step towards a general technique for suppression of an arbitrary mode. [2017–0251]
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::28c6496823d05350d9a1a527612fa0b7 https://doi.org/10.1109/jmems.2018.2793100 Zobrazit plný text záznamu