Specific contact resistance extraction from four-point-probe measurements on multilayered film structures
| Autor: | Quat T. Vu, L. E. Halperin, M.-A. Nicolet, Elzbieta Kolawa |
|---|---|
| Rok vydání: | 1991 |
| Předmět: |
Contact pad
Measurement method Chemistry Extraction (chemistry) Contact resistance chemistry.chemical_element Condensed Matter Physics Electric contact Electronic Optical and Magnetic Materials Multiple layer Aluminium Materials Chemistry Electronic engineering Point (geometry) Electrical and Electronic Engineering Composite material |
| Zdroj: | Solid-State Electronics. 34:279-283 |
| ISSN: | 0038-1101 |
| DOI: | 10.1016/0038-1101(91)90185-2 |
| Popis: | A transmission-line type model is developed for the four-point-probe measurement of multilayered structures. It is shown that the specific contact resistance between two layers can be extracted from this type of measurement without incurring the problem of non-ideal contact-pad geometries usually encountered in contact resistance problems. This method can be visualized as a probing of the potential distribution on an infinite contact pad. Experimental verification of the model is conducted on as-deposited SiO2/Al/RuO2/Al structures. Excellent agreement is found between theory and experiment. A value of 6 × 10−5 Ωcm2 to within a factor of two is obtained for the as-deposited specific contact resistance between Al and RuO2. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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