Non-contact carrier density measurement of semiconductor wafers by terahertz spectroscopic ellipsometry

Autor:	Akiyoshi Irisawa, Motoki Imamura, Tomoyu Yamashita, T. Okada, M. Suga
Rok vydání:	2015
Předmět:	Materials science business.industry Terahertz radiation Detector Doping Physics::Optics Terahertz spectroscopy and technology Condensed Matter::Materials Science Semiconductor Ellipsometry Optoelectronics Wafer business Common emitter
Zdroj:	2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz).
DOI:	10.1109/irmmw-thz.2015.7327471
Popis:	We developed a terahertz ellipsometry system that can measure the complex dielectric characteristics of doped semiconductors and evaluate the carrier density and mobility in a non-destructive, non-contact way. The system is constructed of optical-fiber pigtail-coupled terahertz emitter and detector, and delivers high measurement precision and stability. We demonstrated carrier-density measurement of n-type GaAs wafer and n-type SiC epitaxial film using this system, and confirmed a good agreement with conventional measurement methods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::28acfd4732f7e00ae54aa83d663b5080 https://doi.org/10.1109/irmmw-thz.2015.7327471 Zobrazit plný text záznamu