Transformation of polysilicon cutting waste into SiC/α-Si3N4 composite powders via electromagnetic induction heating
Autor: | Endong Jin, Jingkun Yu, Tianpeng Wen, Chen Tian, Qiaoyang Sun, Lei Yuan |
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Rok vydání: | 2021 |
Předmět: |
010302 applied physics
Equiaxed crystals Reaction mechanism Materials science Silicon Process Chemistry and Technology Composite number Nanowire chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Impurity 0103 physical sciences Materials Chemistry Ceramics and Composites Nanometre Composite material 0210 nano-technology Ambient pressure |
Zdroj: | Ceramics International. 47:12269-12275 |
ISSN: | 0272-8842 |
DOI: | 10.1016/j.ceramint.2021.01.077 |
Popis: | In order to use polysilicon cutting waste more efficiently, SiC/α-Si3N4 composite powders were prepared via electromagnetic induction heating at ambient pressure. Factors affecting synthesis and reaction mechanisms of the SiC/α-Si3N4 composite powders were investigated. Results show that the morphology of obtained α-Si3N4 consists of particles equiaxed with diameter in the micron range and one-dimensional Si3N4 nanowires with diameter of tens to hundreds of nanometers and length of up to tens of microns. It was found that the addition of NH4Cl can promote nitridation by controlling reaction temperature and participating in the reaction. In addition, the existence of Fe2O3 impurities was found to be beneficial to the formation of α-Si3N4 in reaction process by removing the SiO2 film from silicon and providing FeSi2 liquid phase as effective pass for vapor phase. Mechanisms used to grow Si3N4-NWs were vapor-solid (VS) and vapor-liquid-solid (VLS) depositions. |
Databáze: | OpenAIRE |
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