| Autor: |
A. C. Boccara, A. Dubois, J.P. Piel, P. Boher, J. L. Stehle |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468). |
| DOI: |
10.1109/imnc.2001.984182 |
| Popis: |
A new phase shifting interferometry based on the integrating-bucket technique with sinusoidal phase modulation is presented. The phase modulation is achieved by sinusoidal oscillation of an objective and a mirror attached to a PZT. Phase images are produced in real time at a rate of several Hertz. The system is not very sensitive to the vibrations and gives excellent accuracies and repeatabilities which makes it very suitable to the characterization of the nanodevices. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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