Tailoring pulsed laser deposition of phosphorus doped WOx films from (PO2)4(WO3)4 target by space-resolved optical emission spectroscopy

Autor:	J. More-Chevalier, S.A. Irimiciuc, L. Volfova, L. Fekete, S. Chertopalov, M. Poupon, E Duverger-Nédellec, L. Herve, M. Novotný, O. Perez, J. Lančok
Rok vydání:	2022
Předmět:	Materials Chemistry Metals and Alloys Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Thin Solid Films. 742:139042
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2021.139042
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::286f69884ee77a68a79883f2bc137498 https://doi.org/10.1016/j.tsf.2021.139042 Zobrazit plný text záznamu Full Text from ScienceDirect