Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition
| Autor: | Jan Tomastik, Jaromír Kopeček, Vincent Mortet, Radim Ctvrtlik, Ladislav Klimša, Zdeněk Remeš, Otakar Frank, Adam Purkrt, Jan Mistrik, Jan Drahokoupil, Petr Janicek, Ladislav Fekete, Andrew Taylor |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
genetic structures Material properties of diamond 02 engineering and technology Chemical vapor deposition engineering.material 010402 general chemistry 01 natural sciences chemistry.chemical_compound Materials Chemistry Silicon carbide Electrical and Electronic Engineering Composite material Mechanical Engineering Diamond General Chemistry Adhesion 021001 nanoscience & nanotechnology eye diseases Ion source 0104 chemical sciences Electronic Optical and Magnetic Materials chemistry engineering sense organs Antenna (radio) 0210 nano-technology Microwave |
| Zdroj: | Diamond and Related Materials. 69:13-18 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2016.06.014 |
| Popis: | In this work, we detail the properties of thin silicon carbide and polycrystalline diamond layers grown by microwave plasma enhanced chemical vapour deposition with linear antenna delivery. Structural, mechanical and optical properties are compared for their potential use as transparent hard coatings. Silicon carbide layers exhibit mechanical properties comparable to thin diamond layers but with a significantly higher adhesion and lower optical absorption coefficient over a wide spectral range. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect