Phase transformation in sputtered Ti–SS alloy film during plasma nitriding
| Autor: | Jaroslav Vlček, M. Benda, V. Ježek, Jindrich Musil |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
Glow discharge
Materials science Metallurgy Alloy Metals and Alloys Analytical chemistry Surfaces and Interfaces Substrate (electronics) engineering.material Surfaces Coatings and Films Electronic Optical and Magnetic Materials Iron nitride chemistry.chemical_compound chemistry Sputtering Phase (matter) Cavity magnetron Materials Chemistry engineering Nitriding |
| Zdroj: | Thin Solid Films. 317:458-462 |
| ISSN: | 0040-6090 |
| Popis: | The paper reports on a phase transformation in sputtered Ti–SS (stainless steel) alloy film during its plasma nitriding. First, it is shown that a Ti–SS film containing of about 9.5 wt.% of Fe is, when magnetron sputter deposited at low substrate temperatures below 100°C, a high-temperature cubic β-Ti phase film. A formation of high-temperature structure is due to a `mixing effect', i.e., to an addition of Fe to Ti. During plasma nitriding of high-temperature cubic β-Ti phase film, an opposite process takes place. The amount of Fe in the Ti–SS film reduces due to a formation of iron nitride γ′–Fe4N. A depletion of Fe in the Ti–Fe alloy results in a phase conversion. The high-temperature cubic β-Ti phase converts into a low temperature hexagonal α-Ti phase when the amount of Fe decreases below a minimum value necessary to sustain a high temperature structure of Ti–SS alloy film. The plasma nitriding was carried out in an anomalous glow discharge in a mixture of N2+H2 at the total pressure 1067 Pa for 2 h at 550°C. |
| Databáze: | OpenAIRE |
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