| Autor: |
Gabriele A. Ringel, Helmut H. Toebben, Frank Kratz, Dirk-Roger Schmitt |
| Rok vydání: |
1996 |
| Předmět: |
|
| Zdroj: |
Specification, Production, and Testing of Optical Components and Systems. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.246751 |
| Popis: |
The power spectral density (PSD) is the most appropriate way to characterize the microroughness of a surface with a spatial wavelength range from several centimeters to a few hundred nanometers. Novel concepts to specify optical surfaces using the PSD are discussed. The results are applied to measurements obtained by a n optical heterodyne profilometer, by a mechanical profiler nanostep, and by an atomic force microscope. It is demonstrated that this method could yield a bandwidth independent model for the description of surface parameters. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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