Design of monocrystalline Si/SiGe multi-quantum well microbolometer detector for infrared imaging systems
| Autor: | Yasar Gurbuz, Barbaros Cetindogan, Melik Yazici, Mehmet Kaynak, Atia Shafique, Canan Baristiran Kaynak, Emre Can Durmaz |
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| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Materials science Infrared business.industry Detector Bolometer chemistry.chemical_element Germanium Microbolometer 02 engineering and technology 01 natural sciences law.invention 010309 optics Monocrystalline silicon 020210 optoelectronics & photonics Optics chemistry law 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Optoelectronics business Quantum well |
| Zdroj: | Infrared Technology and Applications XLII. |
| ISSN: | 0277-786X |
| Popis: | This paper presents the design, modelling and simulation results of silicon/silicon-germanium (Si/SiGe) multi-quantum well based bolometer detector for uncooled infrared imaging system. The microbolometer is designed to detect light in the long wave length infrared (LWIR) range from 8 to 14 μm with pixel size of 25 x 25 μm. The design optimization strategy leads to achieve the temperature coefficient of resistance (TCR) 4.5%/K with maximum germanium (Ge) concentration of 50%. The design of microbolometer entirely relies on standard CMOS and MEMS processes which makes it suitable candidate for commercial infrared imaging systems. |
| Databáze: | OpenAIRE |
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