A predictive analytical model of 3D MIM capacitors for RC IC

Autor:	M. Minondo, E. Picollet, N. Segura, Daniel Gloria, Sebastien Cremer, Lorenzo Ciampolini
Rok vydání:	2007
Předmět:	Engineering business.industry Circuit design Process (computing) CPU time Hardware_PERFORMANCEANDRELIABILITY Bicmos technology law.invention Capacitor Transmission (telecommunications) Hardware_GENERAL law Hardware_INTEGRATEDCIRCUITS Electronic engineering RLC circuit Equivalent circuit business
Zdroj:	2007 IEEE International Electron Devices Meeting.
Popis:	This paper reports a predictive analytical transmission RLC model of 3D MIM capacitors in a 0.13 mum BICMOS technology. The aim of this predictive model is to help circuit design with compatible CPU time. It allows adjusting process parameters in order to optimize electrical features. The model has been compared with electromagnetic simulations and S-parameters measurements up to 42 GHz.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::27ef6b8d56791aa25c9818c435b98504 https://doi.org/10.1109/iedm.2007.4418998 Zobrazit plný text záznamu