Investigation of Different Nano Scale Energetic Material Systems for Reactive Wafer Bonding

Autor:	S. Anbumani, D. Klimm, Jan Besser, T. Gessner, M. Wiemer, Joerg Braeuer, E. Tomoscheit
Rok vydání:	2013
Předmět:	Exothermic reaction Materials science Chemical engineering Anodic bonding Wafer bonding Heat generation Chip Nanoscopic scale Energetic material
Zdroj:	ECS Transactions. 50:241-251
ISSN:	1938-6737 1938-5862
DOI:	10.1149/05007.0241ecst
Popis:	This paper introduces a method that uses a specific form of local heat generation, which is based on nano scale reactive multilayer systems. Such systems consist of several layers of minimum two different materials with nano scale thicknesses. These layers generate heat based on a self-propagating exothermic reaction during their intermixing. The resulting heat can be used as heat source for bonding processes at chip and wafer-level.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::27ba203d73ba43c74c52d0ce934c19fe https://doi.org/10.1149/05007.0241ecst Zobrazit plný text záznamu