Synthesis and characterization of thin-film molybdenum nitrides

Autor: F. Bouillon, M. Jardinier-Offergeld, M. Maoujoud
Rok vydání: 1993
Předmět:
Zdroj: Applied Surface Science. 64:81-89
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90267-f
Popis: The action of ammonia on Mo(bcc)/MgO, obtained by thermal evaporation, leads to the formation of a mixture of γ-Mo2N and γ-MoN phases. Their experimental conditions of separation and stability are determined and a structural discussion is presented. It was also found that MgO(100) is suitable for epitaxial growth of nitrides of cubic symmetry at high temperature (T > 1073 K), owing to the thermal stability of magnesium oxide. The coatings are characterized by transmission high-energy electron diffraction (THEED), transmission electron microscopy (TEM), and Auger electron spectroscopy (AES).
Databáze: OpenAIRE