| Autor: |
Clement Berthet, Vincent Agache, Beatrice Icard, Francois Baleras, Celine Hadji, Martine Cochet |
| Rok vydání: |
2015 |
| Předmět: |
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| Zdroj: |
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: |
10.1109/memsys.2015.7050916 |
| Popis: |
This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 4 femtograms. The sensors performances - 10,000-range Q factor and ppb-range frequency stability - make them amenable to individual particles metrology from a few 10 nm up to the micrometer diameter range. These devices are operating in air, connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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