Synthesis and characterization of alkaline-earth-metal .beta.-diketonate complexes used as precursors for chemical vapor deposition of thin film superconductors

Autor:	Robert M. Barkley, S. B. Turnipseed, Robert E. Sievers
Rok vydání:	1991
Předmět:	Thermogravimetric analysis Chemistry Metal ions in aqueous solution Inorganic chemistry Chemical vapor deposition Mass spectrometry Dissociation (chemistry) Inorganic Chemistry Metal visual_art visual_art.visual_art_medium Molecule Physical and Theoretical Chemistry Thin film
Zdroj:	Inorganic Chemistry. 30:1164-1170
ISSN:	1520-510X 0020-1669
DOI:	10.1021/ic00006a003
Popis:	Several of the {beta}-diketonate metal complexes used for metal organic chemical vapor deposition (MOCVD) of thin-film superconductors have been characterized by thermogravimetric analysis, mass spectrometry, and gas chromatography/mass spectrometry. The volatility of the alkaline-earth-metal chelates has been studied, and it has been determined that one reason the alkaline-earth-metal chelates are less volatile than other metal {beta}-diketonates is that they exist as oligomers. For example, one barium {beta}-diketonate chelate consists of a cluster of five metal ions bridged by {beta}-diketonate carbonyl oxygens and water molecules. It has also been found that the addition of uncomplexed (protonated) {beta}-keto enolate ligand to the carrier gas stream greatly improves the gas chromatographic behavior of these alkaline-earth-metal chelates, probably owing to adduct formation accompanying the dissociation of the oligomers. The results of these studies, as well as the implications for using these chelates together with auxiliary ligands for MOCVD, will be discussed. 3 tables, 5 figs., 26 refs.
Databáze:	OpenAIRE
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