Evaluating the Wall-Recombination Constant of Cl Atoms in Cl2-Ar Plasmas of Different Ar Percentage

Autor:	Yu. V. Kirillov, D. V. Sitanov
Rok vydání:	2005
Předmět:	Glow discharge Materials science Materials Chemistry Plasma Electrical and Electronic Engineering Atomic physics Condensed Matter Physics Constant (mathematics) Recombination Electronic Optical and Magnetic Materials
Zdroj:	Russian Microelectronics. 34:217-221
ISSN:	1608-3415 1063-7397
DOI:	10.1007/s11180-005-0031-6
Popis:	The dependence is investigated of the Cl-atom wall-recombination constant on Ar percentage for a reduced-pressure glow discharge in Cl2-Ar mixtures.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::26d7b6350a1db2c47baebceb9ee849e4 https://doi.org/10.1007/s11180-005-0031-6 Zobrazit plný text záznamu Full text from SpringerLink