Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy

Autor:	Kristen L. Genter, Matt D. Brubaker, Samuel Berweger, Jonas C. Gertsch, Kris A. Bertness, Pavel Kabos, Victor M. Bright
Rok vydání:	2022
Předmět:	Mechanical Engineering Electrical and Electronic Engineering
Zdroj:	Journal of Microelectromechanical Systems. 31:483-485
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2022.3172645
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::26b509cdd2dbdf76cf18aa543d234e20 https://doi.org/10.1109/jmems.2022.3172645 Zobrazit plný text záznamu