X-ray beam induced current/microprobe x-ray fluorescence: synchrotron radiation based x-ray microprobe techniques for analysis of the recombination activity and chemical nature of metal impurities in silicon

Autor:	Andrei A. Istratov, Eicke R. Weber, Tonio Buonassisi, O. F. Vyvenko
Rok vydání:	2003
Předmět:	Microprobe Silicon chemistry Impurity Electron beam-induced current Resolution (electron density) Analytical chemistry X-ray fluorescence Synchrotron radiation chemistry.chemical_element General Materials Science Condensed Matter Physics Beam (structure)
Zdroj:	Journal of Physics: Condensed Matter. 16:S141-S151
ISSN:	1361-648X 0953-8984
DOI:	10.1088/0953-8984/16/2/017
Popis:	In this study we report applications of the synchrotron radiation based x-ray microprobe techniques, x-ray beam induced current (XBIC) and microprobe x-ray fluorescence (μ-XRF), to the analysis of the recombination activity and spatial distribution of transition metals in silicon. A combination of these two techniques enables one to study the elemental nature of defects and impurities and their recombination activity in situ and to map metal clusters with a micron-scale resolution. The correspondence between XBIC data and the data obtained by conventional recombination-sensitive mapping techniques such as electron beam induced current and laser beam induced current is demonstrated. An approach that allows determination of the depth of metal precipitates from several XBIC/μ-XRF images taken for different sample orientations is suggested and is experimentally demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::268ea925b0b2fae241151b9b8b10063a https://doi.org/10.1088/0953-8984/16/2/017 Zobrazit plný text záznamu