Contact reliability improvement of a poly-SiGe based nano-relay with titanium nitride coating
| Autor: | Simone Severi, Haris Osman, K. De Meyer, Maliheh Ramezani, A. Moussa, Hendrikus Tilmans |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
business.industry Contact resistance chemistry.chemical_element engineering.material Titanium nitride law.invention chemistry.chemical_compound chemistry Coating Relay law Nano engineering Electronic engineering Optoelectronics Tin business Contact area Armature (electrical engineering) |
| Zdroj: | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: | 10.1109/transducers.2015.7180989 |
| Popis: | This work reports a TiN coated contact implemented in a vertically actuated SiGe-based Nano-Electro-Mechanical (NEM) relay. It is shown that covering the bottom of the movable SiGe beam (the armature) with a TiN layer in the contact region will improve the contact performance of the relay with lowering the on-resistance, R ON , by around 4 orders of magnitude and by enhancing the number of switching cycles without degradation. This NEM relay provides an optimal combination of small motional volume (∼0.02µm3) and long mechanical lifetime (> 1010 in vacuum). Furthermore, with a total contact area of 0.01µm2 (among the smallest reported so far), an on-resistance of ∼1MΩ has been achieved. |
| Databáze: | OpenAIRE |
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