Raman scattering, AFM and nanoindentation characterisation of diamond films obtained by hot filament CVD
| Autor: | Bodo Wolf, Asta Richter, Valery G. Golubev, M. Ya. Valakh, S. A. Grudinkin, I.B. Yanchuk, N. A. Feoktistov, A. Ya. Vul |
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| Rok vydání: | 2004 |
| Předmět: |
Materials science
Silicon Mechanical Engineering Material properties of diamond Mineralogy chemistry.chemical_element Diamond General Chemistry Nanoindentation engineering.material Electronic Optical and Magnetic Materials symbols.namesake Carbon film chemistry Materials Chemistry symbols engineering Electrical and Electronic Engineering Composite material Nanodiamond Raman spectroscopy Raman scattering |
| Zdroj: | Diamond and Related Materials. 13:266-269 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2003.11.001 |
| Popis: | In this work, structure and mechanical properties of diamond films fabricated by HFCVD on silicon substrates with nanodiamond seeding were investigated. Raman spectroscopy was used to characterise the diamond phase content, crystalline quality and source of stresses in these films. Topography, hardness and Young's modulus were studied by scanning force microscopy (SFM) and nanoindentation methods. It has been ascertained that for the diamond films grown on silicon substrates with nanodiamond seeding hardness and crystalline quality is higher than for films on scratched silicon. The diamond films demonstrate Raman upshift with respect to natural diamond, indicating presence of internal compressive stress. It was shown that various types of impurities and defects induce compressive stresses in the diamond grains. |
| Databáze: | OpenAIRE |
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