Mask synthesis for silicon photonics devices
Autor: | Rainer Zimmermann, Luis Orbe, Bernd Küchler, Ji Li, Jim Burdorf, William Stanton, Tung-Yu Su, Remco Stoffer, Ulrich Klostermann, Wolfgang Demmerle |
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Rok vydání: | 2022 |
Zdroj: | Integrated Photonics Platforms II. |
DOI: | 10.1117/12.2620724 |
Databáze: | OpenAIRE |
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