Effect of the charge distribution at the interface on the properties of PZT/SiO2/Si heterostructure

Autor: Bai-ru Zhao, Weizhi Gong, Chun Cai, Zhao Hao, Yuan Lin, Bo Xu
Rok vydání: 2001
Předmět:
Zdroj: Ferroelectrics. 252:321-328
ISSN: 1563-5112
0015-0193
DOI: 10.1080/00150190108016272
Popis: Asymmetry related to the conduction type of the Si substrate and polarization direction of PZT were found in the polarization-voltage (P-V) loops, capacitance voltage (C-V) curves and resistance of the integrated system. According to the configuration and the characteristic of the integrated structure, we suggest that the space-charge layer in Si and the tunneling process between Si and PZT during the polarization are the main causes for this asymmetry.
Databáze: OpenAIRE