905 Development of Pneumatic Servo Bearing Actuator for Ultraprecise Positioning : Improvement of Performances by Feedback Controls
Autor: | Takashi Matsuoka, Sasaki Katsumi, Takakazu Kitagawa, Masato Kadotani, Tomoko Hirayama, Satoshi Katto |
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Rok vydání: | 2009 |
Předmět: | |
Zdroj: | The Proceedings of Conference of Kansai Branch. :9-5 |
ISSN: | 2424-2756 |
DOI: | 10.1299/jsmekansai.2009.84._9-5_ |
Databáze: | OpenAIRE |
Externí odkaz: |