905 Development of Pneumatic Servo Bearing Actuator for Ultraprecise Positioning : Improvement of Performances by Feedback Controls

Autor: Takashi Matsuoka, Sasaki Katsumi, Takakazu Kitagawa, Masato Kadotani, Tomoko Hirayama, Satoshi Katto
Rok vydání: 2009
Předmět:
Zdroj: The Proceedings of Conference of Kansai Branch. :9-5
ISSN: 2424-2756
DOI: 10.1299/jsmekansai.2009.84._9-5_
Databáze: OpenAIRE