Autor: |
Han-Jun Kim, Carl Taussig, Alejandro de la Fuente Vornbrock, Albert Jeans, John Maltabes, Hao Luo, Ping Mei, Craig Perlov, Richard E. Elder, Edward Holland, Randy Hoffman, Neil Morrison |
Rok vydání: |
2013 |
Předmět: |
|
Zdroj: |
SID Symposium Digest of Technical Papers. 44:275-278 |
ISSN: |
0097-966X |
DOI: |
10.1002/j.2168-0159.2013.tb06199.x |
Popis: |
Self-aligned imprint lithography (SAIL) is currently being upgraded to a next stage to better address the needs for roll-to-roll compatible manufacturing of large-sized flexible OLED display backplanes. Cu and oxide semiconductors are preferred choices of materials, and control of process and yield becomes even more important an issue. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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