Advances in applications of nanostructured silicon as a new multifunctional material
| Autor: | M. M. Melnichenko, K. V. Svezhentsova |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Silicon Scanning tunneling spectroscopy chemistry.chemical_element Nanotechnology 02 engineering and technology General Chemistry 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Isotropic etching 0104 chemical sciences chemistry Homogeneous Single crystal silicon Surface modification General Materials Science 0210 nano-technology Biosensor |
| Zdroj: | Molecular Crystals and Liquid Crystals. 698:1-11 |
| ISSN: | 1563-5287 1542-1406 |
| DOI: | 10.1080/15421406.2020.1731082 |
| Popis: | The presented method of surface modification of single-crystal silicon by chemical etching makes it possible to obtain homogeneous nanostructured silicon layers with a thickness from 3 to 60 nm for... |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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