Leakage detection in wire-bonding gas supply system
| Autor: | Haoming Chang, Yue Zhang |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Imagination
Wire bonding Engineering Hardware_MEMORYSTRUCTURES Chemical substance business.industry media_common.quotation_subject Electrical engineering Hardware_PERFORMANCEANDRELIABILITY Automotive engineering Volumetric flow rate Pipeline transport Search engine Hardware_GENERAL Hardware_INTEGRATEDCIRCUITS business Electrical impedance Hardware_LOGICDESIGN media_common Leakage (electronics) |
| Zdroj: | 2016 IEEE 18th Electronics Packaging Technology Conference (EPTC). |
| DOI: | 10.1109/eptc.2016.7861485 |
| Popis: | A leakage detection system and a method used for detecting leakages in the wire bonding gas supply system are introduced. The leakage detection system is connected to the pipeline remotely from the gas outlet. The detection module receives flow rate signal and monitors the flow rate changes that represent the leakage in the pipeline. The importance of leakage detection in wire bonding system will be introduced first. The process of determining the reference flow rate and leakage detection will be illustrated thereafter. An impedance system is then highlighted so as to amplify the changes. The amplification helps to facilitate a more accurate measurement. The experiments are executed through the use of artificial leakages. The results show that any repetition of leakages can be successfully detected. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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