Structural damage in InGaN induced by MeV heavy ion irradiation

Autor: Limin Zhang, C.H. Zhang, P. Hu, Jiangtao Zhao, R. C. Fadanelli, Tianhe Wang
Rok vydání: 2015
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :53-56
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2015.04.065
Popis: In0.18Ga0.82N films were irradiated with 4 MeV Kr-84 and 8.9 MeV Bi-209 ions to various fluences at room temperature. The irradiated films were analyzed by means of Rutherford backscattering/channeling (RBS/C) and high resolution X-ray diffraction (HRXRD). The RBS/C measurements show that under the irradiation conditions, the relative lattice disorder in the films, obtained from the normalized backscattering yield, exhibits a rapid increase in the range from similar to 2% to 68%. There is also an increasing lattice expansion of the films with increasing ion fluence, as determined by the HRXRD measurements. At a comparable level of lattice disorder, the Kr irradiation leads to a more pronounced lattice expansion than the Bi irradiation. This may be attributed to a larger portion of the single interstitials in the films produced by the lighter Kr ion irradiation. (C) 2015 Elsevier B.V. All rights reserved.
Databáze: OpenAIRE