Precursor for the Low-Temperature Deposition of Titanium Phosphide Films

Autor:	James W. Proscia, T. Suren Lewkebandara, Charles H. Winter
Rok vydání:	1995
Předmět:	chemistry.chemical_compound Low temperature deposition Chemistry Phosphide General Chemical Engineering Inorganic chemistry Materials Chemistry chemistry.chemical_element General Chemistry Titanium
Zdroj:	Chemistry of Materials. 7:1053-1054
ISSN:	1520-5002 0897-4756
DOI:	10.1021/cm00054a003
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2563d7a56bc04f932479f4247de7228a https://doi.org/10.1021/cm00054a003 Zobrazit plný text záznamu