Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts
| Autor: | S. Mischler, A. Bertch, Sébastien Jiguet, Philippe Renaud, Moshe Judelewicz |
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| Rok vydání: | 2006 |
| Předmět: |
Filler (packaging)
Nanocomposite Materials science Nanoparticle Epoxy Photoresist engineering.material Condensed Matter Physics Frictional coefficient Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Coating visual_art engineering visual_art.visual_art_medium Electrical and Electronic Engineering Composite material Internal stress |
| Zdroj: | Microelectronic Engineering. 83:1273-1276 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2006.01.068 |
| Popis: | The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper. It was found that the nanoparticles lower the internal stress and decrease the wear rate and frictional coefficient of the SU8 epoxy. The applicability of this technology is demonstrated on gear wheels configuration and coating multilayer capping technology on moving micro-parts. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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