Localized GaAs Etching with Acidic Hydrogen Peroxide Solutions
| Autor: | Don W. Shaw |
|---|---|
| Rok vydání: | 1981 |
| Předmět: |
chemistry.chemical_compound
Materials science chemistry Renewable Energy Sustainability and the Environment Etching (microfabrication) Inorganic chemistry Materials Chemistry Electrochemistry Condensed Matter Physics Hydrogen peroxide Surfaces Coatings and Films Electronic Optical and Magnetic Materials |
| Zdroj: | Journal of The Electrochemical Society. 128:874-880 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/1.2127524 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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