Glancing Angle Deposition Thin Film Microstructures for Microfluidic Applications

Autor:	Gregory K. Kiema, Martin O. Jensen, Michael J. Brett
Rok vydání:	2005
Předmět:	Glancing angle deposition Materials science General Chemical Engineering Microfluidic channel Microfluidics Materials Chemistry Nanotechnology General Chemistry Substrate (electronics) Thin film Microstructure Porosity Thin film morphology
Zdroj:	Chemistry of Materials. 17:4046-4048
ISSN:	1520-5002 0897-4756
DOI:	10.1021/cm040387v
Popis:	Microfluidic channels (A) were fabricated by a new GLAD method with thin film porosity engineering capabilities. Smooth areas of a substrate result in fairly compact thin film morphology (C) while areas of the same substrate pre-patterned with a periodic array of seeds (B) are quite porous and permit liquid flow.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::25115f3f2a2314c89b70f2e8043aac43 https://doi.org/10.1021/cm040387v Zobrazit plný text záznamu