| Autor: |
Yongjun Wu, Dacheng Li, Mang Cao, Yuechuan Lu |
| Rok vydání: |
1996 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.245175 |
| Popis: |
This paper describes an high precision in-process optical surface profilometer system. The measurement principle of the profilometer is based on phase comparison of optical heterodyne signals. Disturbance from environment vibration and mechanical instability of the interferometer was effectively eliminated by using optical and electronic common-mode rejection techniques. Measuring light can be automatically focused on the surface by a moving-coil lens during the sample scanning process. The size of the profilometer is small since a laser diode is used instead of a big He-Ne laser. This profilometer is suitable for use on machine. The height sensitivity is of the order of 1 nm and lateral resolution is 0.8 micrometers .© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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