A Two-Dimensional MoS2 Device and CMOS Inverter Based on the Plasma Immersion Doping Technique

Autor:	Yuan Zhang, Shijiao Hu, Yufei Zhou, Tingwei Xu, Yu Peng, Huaicheng Deng, Xiaoqing Bao, Xiangbin Zeng
Rok vydání:	2023
Předmět:	Materials Chemistry Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Journal of Electronic Materials.
ISSN:	1543-186X 0361-5235
DOI:	10.1007/s11664-023-10462-2
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2487d1fde44d32f5d79d8ce42c636c33 https://doi.org/10.1007/s11664-023-10462-2 Zobrazit plný text záznamu Full text from SpringerLink