Bulk-limited conduction of Ge-implanted thermally grown SiO2 layers

Autor: Wolfgang Skorupa, Thoralf Gebel, J. Zhao, Lars Rebohle, J von Borany
Rok vydání: 2002
Předmět:
Zdroj: Solid-State Electronics. 46:661-664
ISSN: 0038-1101
Popis: The electrical conduction mechanism of Ge-implanted SiO 2 films exhibiting room-temperature blue electroluminescence with a power efficiency of up to 5×10 −4 [Appl. Phys. Lett. 71 (1997) 2809] is investigated. In detail it will be shown that the current–voltage characteristic of Ge-implanted SiO 2 layers for applied electric fields between 4.5 and 7 MV cm −1 can be modeled very well with the space charge limited (SCL) conduction mechanism in the trap-filled-limited (TFL) region. The current density j shows a power law dependence j ∝ E α of the applied electric field E , and the temperature dependence of α exhibits the typical behavior of TFL injection currents. For applied electric fields above 7 MV cm −1 the charge transport mechanism is explained by SCL currents which are superimposed by effects of field emission, impact ionization, and electron–hole recombination.
Databáze: OpenAIRE