Investigation of nanostructures morphology of rough silicon surface irradiated by nanosecond laser pulses in distilled water
| Autor: | M. Sobhani, F. Pahang, Mohammad Hossein Mahdieh |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Materials science
Nanostructure Silicon Physics::Instrumentation and Detectors business.industry technology industry and agriculture chemistry.chemical_element Nanosecond equipment and supplies Laser complex mixtures Fluence law.invention Nanoclusters Optics chemistry law Irradiation business Beam (structure) |
| Zdroj: | XIX International Symposium on High-Power Laser Systems and Applications 2012. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.2010384 |
| Popis: | In this paper, we present experimental results of an investigation in silicon surface morphology induced by nanosecond laser pulses in distilled water. The silicon surface was initially rough at micro-scale and irradiated by nanosecond regime laser at different pulse numbers and fluences. Under the conditions of the experiment, nano-structure cluster morphology was formed on the surface of silicon after exposed to the laser beam. The effective diameter and surface density of clusters were estimated from the SEM images of irradiated silicon. Optical reflectivity of silicon surface was also measured by a probe beam. The reflectivity results present an estimation of the clusters height. The results show that the number of nanoclusters depends effectively on laser fluence and pulse numbers. Moreover, the nanoclusters height is influenced by pulse numbers. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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