Parameter identification from frequency response of MEMS energy harvesters
Autor: | Cuong Phu Le, Einar Halvorsen, Binh Duc Truong |
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Rok vydání: | 2017 |
Předmět: | |
Zdroj: | SPIE Proceedings. |
ISSN: | 0277-786X |
DOI: | 10.1117/12.2264094 |
Popis: | In this study, we present theoretical analysis and numerical results on a simple technique for extracting unknown model parameters for MEMS electrostatic energy harvesters. We show that the frequency response can be utilized in a least-squares minimization scheme to estimate the damping coefficient, mechanical stiffness and transducer/load parasitic capacitances. The accuracy of the method is tested by application to simulated cases of linear and non-linear harvesters. A single data sweep from such a pseudo-experiment suffices to determine the unknown parameters of the electromechanical model with accuracy. The method is shown to work satisfactorily for both linear and nonlinear devices. |
Databáze: | OpenAIRE |
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