Design, Synthesis, and Evaluation of a Novel Amphiphilic Alicyclic Polymer Having γ-Hydroxy Acid Structure
| Autor: | Hiroshi Shiraishi, Ryoko Yamanaka, Takashi Hattori, Yuko Tsuchiya |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
chemistry.chemical_classification
General Chemical Engineering Chemical modification Maleic anhydride Infrared spectroscopy General Chemistry Polymer Alicyclic compound chemistry.chemical_compound chemistry Polymer chemistry Amphiphile Materials Chemistry medicine Solubility Swelling medicine.symptom |
| Zdroj: | Chemistry of Materials. 10:1789-1794 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/cm9707420 |
| Popis: | An amphiphilic alicyclic polymer having γ-hydroxy acid structure has been developed by reduction of poly(5-methylenebicyclo[2,2,1]-2-heptene)-co-(maleic anhydride). This polymer exhibits moderate transparency at 193 nm and good alkali solubility. A two-component negative resist system, consisting of the polymer and an onium salt, produces sub-micrometer patterns without swelling distortion by using an ArF excimer laser stepper. Infrared spectroscopy shows that the insolubilization reaction is mainly intramolecular esterification of γ-hydroxy acid to γ-lactone. The swelling distortion of sub-micrometer patterns can thus be avoided by drastically decreasing the number of carboxyl groups in the exposed area. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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