Design studies of a high-pulse excimer Eurolaser

Autor:	Gerard J. Ernst, Wilhelmus J. Witteman, G.B. Ekelmans, M. Trentelman, Frederik A. van Goor
Rok vydání:	1990
Předmět:	Materials science Excimer laser business.industry medicine.medical_treatment Pulsed power Laser Excimer Cathode law.invention Pulse (physics) Optics law Pulse compression Cathode ray medicine business
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.18479
Popis:	Design considerations concerning a high power XeCl excimer laser are described. The subsystems to be investigated are the gas flow circulating system with a homogeneous velocity profile and thin boundary layers near the electrodes, a pulse power circuit scheme that takes care of an efficient stable discharge and the X-ray preionization source with a high repetition rate electron beam cathode. Pulse compression technology at high repetion rate plays a key role in the laser performance.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::23cb6f3f08644c26f28d622699ffa007 https://doi.org/10.1117/12.18479 Zobrazit plný text záznamu