| Autor: |
Annelies Falepin, Kofi A. A. Makinwa, Eric Sterckx, Hilco Suy, Zeyu Cai, Michiel A. P. Pertijs, R.H.M. van Veldhoven |
| Rok vydání: |
2015 |
| Předmět: |
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| Zdroj: |
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| Popis: |
This paper reports a CO 2 sensor intended for indoor air-quality sensing. Both the thermal-conductivity-based CO 2 transducer and its readout circuit have been realized in 0.16µm CMOS technology. The readout circuit, based on an incremental ΔΣ ADC, employs ratiometric measurements to circumvent the need for a stable power reference. The sensor achieves 228ppm (1σ) CO 2 resolution in a 70s measurement time, while consuming 11.2mW from a 1.8V supply. This resolution is 2x better than that of state-of-the-art thermal-conductivity-based CO 2 sensors, thus facilitating the realization of fully-integrated CO 2 sensors for air-quality monitoring, and a significant reduction in their cost (>10x) and volume (>100x) compared with the non-integrated CO 2 sensors. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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