Simulation studies on sputtering in rough surface

Autor:	Takahiro Kenmotsu, N. Hirotani, Yasunori Yamamura, Tetsuya Muramoto
Rok vydání:	2005
Předmět:	Nuclear and High Energy Physics Planar Fractal Sputtering Chemistry Rough surface Monte Carlo method Surface binding Surface roughness Atomic physics Instrumentation Computational physics Ion
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 228:369-372
ISSN:	0168-583X
DOI:	10.1016/j.nimb.2004.10.072
Popis:	The influence of a surface roughness on sputtering is studied using a Monte Carlo simulation code ACAT. In order to estimate this influence in ACAT calculation, the ACAT code is modified. The two-dimensional fractal surface model is applied to the ACAT code and a surface binding energy of a target material is estimated by a many-body tight-binding potential. Simulation results calculated with the modified ACAT are compared with experimental data and the standard planar ACAT on sputtering yields of a Mo surface irradiated with 2 keV D + ions. The modified ACAT code predicts well experimental data from rough surfaces compared with the standard planar ACAT code.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2361227cade62b76ea95dddba8c79ff3 https://doi.org/10.1016/j.nimb.2004.10.072 Zobrazit plný text záznamu Full Text from ScienceDirect