Investigation of copper diffusion in SiOF, TEOS-oxide and TCA-oxide using bias thermal stress (BTS) tests

Autor:	Mary Batista
Rok vydání:	1997
Zdroj:	European Workshop Materials for Advanced Metallization.
DOI:	10.1109/mam.1997.621054
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2339d9e658953404765054360baec2db https://doi.org/10.1109/mam.1997.621054 Zobrazit plný text záznamu